Improved Performance of Capacitive Micromachined Ultrasonic Transducers due to Piston-Structured Plates

New publication online in the open-access journal Micromachines thanks to the collaboration with our cooperation partner Infineon


Capacitive micromachined ultrasonic transducers (CMUTs) represent an accepted technology for ultrasonic transducers, while high bias voltage requirements and limited output pressure still need to be addressed.

In this paper, we present a design for ultra-low-voltage operation with enhanced output pressure.

The CMUT introduced has an ultra-thin gap (120 nm), small plate thickness (800 nm), and is supported by a non-flexural piston, stiffening the topside for improved average displacement, and thus higher output pressure.