Laboratory Microtechnology and Electromechanical Systems (M+EMS)


Field of Research

Electromechanical systems are a matter of constant change in production technology, like experienced decades before in microelectronics. Instead of serial assembling many components preformed by mechanical processing, function determining components are fabricated by microtechnical production techniques. This comes along with a product change to higher achievement potential and miniaturisation. Examples of this product change can be seen in many important industry branches like printing technology, image acquisition (eg. scanners), data storage and sensor systems.

The miniaturisation of electromechanical systems leads to components which need large areas due to their functional aspects, but also be produced by microtechnical manufacturing methods due to the demand of precision in sub micrometer ranges. This includes actors and fluidic systems which need to feature specific sizes eg. for force generation or components of microoptics. For those micro-electro-mechanical systems (MEMS) there are micro production processes like layer deposition, photolithography and etching techniques as well as precision processing methods like laser treatment, micro chipping and packaging techniques.


The research works divide up in application orientated and technological focuses:

- Micro actuators

- Micro optics

- Micro fluidics

- Micro manufacturing methods

- Design methods for micro-electro-mechanical systems (MEMS)


Research works can be thematically organized as follows:

- Precision engineering

- Microsystems technology

- Dielectric Elastomer Actuators